Conductive Probes(AFM 探針)

  • Platinum-Iridium (PtIr)
  • Gold (GG)
  • Doped Diamond (DD)
  • Titanium Nitride (TiN)
  • Cobalt-Chromium (CoCr)



CONDUCTIVE PROBES

  • AppNano offers special metal coating on our highly conductive doped silicon probes for advanced AFM applications like electric force microscopy (EFM) and magnetic force microscopy (MFM)
  • Optimal thickness and highest quality metal coating coupled with our proprietary process achieve best conductivity (sensitivity and lifetime) without compromising tip sharpness (high resolution)
  • Gold coated (GG) probes offer excellent conductivity and chemical stability, are suitable for intermittent/non-contact EFM applications like Electrostatic force microscopy/KPFM, etc.
  • Platinum-Iridium (Pt-Ir) coated probes offer excellent conductivity and good mechanical stability are optimal for contact as well as non-contact EFM techniques
  • Doped diamond coated probes have excellent wear resistance and conductivity, ideal choice for hard contact studies like SSRM, CAFM, SCM as well as electrostatic FM, KPFM, etc.
  • Our new Titanium nitride (TiN) probes offer best conductivity, voltage stability and very good wear resistance. Recommended for Contact as well as Intermittent/Non-contact EFM studies
  • Cobalt-chromium (Co-Cr) coated probes are designed for MFM applications

 

EFM PROBES:

  • For nanoscale electrical characterization, we offer Pt-Ir, gold (GG), boron doped diamond film (DD) and Titanium nitride (TiN) coated probes
  • Coatings available on Contact, Force modulation and Intermittent contact/Non-contact mode levers for various EFM techniques like C-AFM, TUNA, SSRM, SCM, PFM, electrostatic force microscopy, KPFM, etc.

 

PT-IR COATED PROBES:

  • ANSCM series probes are silicon probes coated with Pt-Ir on both sides for EFM applications.
  • Available as ANSCM-PC, ANSCM-PT and ANSCM-PA probes for Contact, Force modulation and Tapping™/Non-contact EFM applications, respectively.
  • ACCESS (tip view) probes coated with Pt-Ir (ACCESS-EFM) for contact/force modulation mode EFM applications.
ACCESS-EFM PtIr coated Tipview EFM Probe ANSCM PtIr coated EFM probe
Parameter ANSCM-PC ANSCM-PT ANSCM-PA ANSCM-PA5 ACCESS-EFM
k (N/m) 0.2 3 40 40 2.7
f (kHz) 12 60 300 300 60
Length 450 225 125 125 245
Width (μm) 40 45 35 35 52
Thickness (μm) 2.5 2.5 4.5 4.5 2.8
Tip ROC (nm) 30 30 30 55 30
PtIr thickness (nm) 25±5 25±5 25±5 50±5 25±5

DOPED DIAMOND (DD) PROBES:

  • These probes offer a unique combination of hardness and electrical conductivity. The tip side of these probes is coated with polycrystalline diamond for excellent hardness, and doped with boron to make it an excellent conductor.
  • These probes are available on contact, force modulation and Tapping™/Non-contact mode Cantilever specs.*s for various EFM applications
Doped Diamond (DD) EFM Probes
Cantilever specs.* DD-SICONA DD-FORTA DD-ACTA DD-ACCESS-NC-A
k (N/m) 0.2 3 40 93
f (kHz) 12 62 300 320
Length (µm) 450 225 125 150
Width (µm) 40 30 35 54
Thickness (µm) 2.5 3 4.5 5.5
Coating (Reflex side) Al (50 nm)
Shape Rectangular
Tip specs.*
Height 14-16 μm
ROC 100-300 nm
Coating 100 nm DD
AR 1.5-3.0

GOLD COATED PROBES:

  • Gold is an excellent conductor with chemical stability
  • ACCESS-FM-GG and ACCESS-NC-GG for non-contact EFM applications that requires direct visualization of the tip
  • ACLGG, ACSTGG, ACTGG and FORTGG probes for Non-contact EFM applications like electrostatic force microscopy, KPFM, etc.
Gold coated ACCESS EFM Probes
Cantilever specs.* ACCESS-FM-GG ACCESS-NC-GG
k (N/m) 2.7 78
f (kHz) 60 300
Length (µm) 245 150
Width (µm) 52 54
Thickness (µm) 2.8 5.2
Coating-Thickness
(µm)
Au (30) Au (30)
Tip specs. *
ROC 30 nm
Height 14-16 μm
Shape Triangular
Coating Au

ACLGG/ACSTGG/ACTGG/FORTGG – Gold coated silicon probes for non-contact EFM applications

Cantilever specs.* ACLGG ACSTGG ACTGG FORTGG
k (N/m) 58 7.8 37 1.6
f (kHz) 190 150 300 61
Length (µm) 225 150 125 225
Width (µm) 40 28 30 27
Thickness (µm) 7.8 3 4 2.7
Tip specs. *
Material Silicon
Shape Tetrahedral
Height 14-16 μm
Coating ((Ti/Au, nm) 10 nm/ 50 nm
Gold coated Silicon EFM Probes
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